A thin film deposition platform to sputter different metals and metal oxides.   

Available deposition methods:

• E-BEAM EVAPORATION
• THERMAL BOAT SOURCe
• DC, RF, pulsed DC (to be integrated)

THERMAL BOAT SOURCE

The single thermal boat source allows for the integration of a range of thermal boats for the deposition of both metals and organics/polymers

E-BEAM EVAPORATORS

E-beam evaporator is used for ultra-thin film deposition with reliable process control. The range consists of a single pocket and a four-pocket source. The control electronics allows up to four sources/pockets to be operated simultaneously. 

Specifications:

• Maximum Sample Size 4” (100mm) diameter
• Turbo Pump   300 ls -1 700 ls -1
• Number of Side Panels 6
• Deposition sources 3 (plus QCM)